Anodic bonding process for ceramics

ABSTRACT

A method of bonding components comprising the following steps. At least a first ceramic component and a second ceramic component are provided. A first conductive layer is formed over the upper surface of the first ceramic component. An intermediate film is formed over the first conductive layer. A second conductive layer is formed over the lower surface of the second ceramic component. The second ceramic component is stacked over the first ceramic component wherein the second conductive layer on the second ceramic component opposes the intermediate film on the first component. The first and second ceramic components are anodically bonded together.

FIELD OF THE INVENTION

The present invention relates generally to bonding and more specificallyto the bonding of ceramic components.

BACKGROUND OF THE INVENTION

Ceramics range from diverse silicates to oxides of Al, Ti, Zr, Be, etc.Ceramics also include non-oxides such as carbides, nitrides and boridesof the transition elements plus multiphase composites which may betotally or partially ceramic.

Ceramics may be used as electrical insulators, semiconductors,conductors or superconductors and may display large piezoelectriceffect, have voltage-sensitive resistance or may have their electricalpermittivity change with humidity. They may be good heat conductors orexcellent thermal insulators and can be used at high operatingtemperatures intolerable by many metals and super alloys. Broadlyspeaking, the permissible operating temperature of ceramics is betweenabout 0.5 to 0.7 Tm where Tm is the ceramic's melting point.

Although the synthesis of ceramic materials for high performance andhigh reliability is advancing tremendously, their commercialization islagging due to poor integration techniques. While scientific andengineering efforts have been focused upon ceramic-metaljoining/bonding, ceramic—ceramic bonding is not, as of yet, as welldeveloped.

U.S. Pat. No. 5,769,997 to Akaike et al. and European PatentSpecification 0619598 A3 0619598 to Akaike et al. both describe anodicbonding of an insulator containing no movable ion and a conductorthrough the medium of a conductive film and an insulator layercontaining movable ions.

U.S. Pat. No. 5,695,590 to Willcox et al. describes anodic bonding tofabricate a pressure sensor.

U.S. Pat. No. 4,452,624 to Wohltjen describes a method for making anairtight seal between a pair of glass plates.

European Patent Specification 0317445 to Gotou describes bonding of afirst silicon substrate coated with silicon oxide to a second siliconsubstrate coated with beta-SiC and/or phosphosilicate glass layer.

SUMMARY OF THE INVENTION

Accordingly, it is an object of one or more embodiments of the presentinvention to provide a method of anodically bonding ceramic componentsat low temperatures.

Other objects will appear hereinafter.

It has now been discovered that the above and other objects of thepresent invention may be accomplished in the following manner.Specifically, at least a first ceramic component and a second ceramiccomponents are provided. Each of the at least first and second ceramiccomponents having an upper and lower surface. A first conductive layeris formed over the upper surface of the first ceramic component. Anintermediate film is formed over the first conductive layer. A secondconductive layer is formed over the lower surface of the second ceramiccomponent. The second ceramic component is stacked over the firstceramic component wherein the second conductive layer on the secondceramic component opposes the intermediate film on the first component.The first and second ceramic components are anodically bonded together.

BRIEF DESCRIPTION OF THE DRAWINGS

The present invention will be more clearly understood from the followingdescription taken in conjunction with the accompanying drawings in whichlike reference numerals designate similar or corresponding elements,regions and portions and in which:

FIGS. 1 to 7 schematically illustrate a preferred embodiment of thepresent invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT

Information Known to the Inventors—Not to be Considered as Prior Art

The following information is known to the inventors and is not to beconsidered as prior art for the purposes of this invention.

The available bonding techniques for ceramic—ceramic bonding are: (1)diffusion bonding; (2) metallic brazing; and (3) glass intermediatelayer bonding.

Diffusion Bonding

In diffusion bonding, the ceramics must be heated up to about 0.6 to 0.8Tm which is an extremely high bonding temperature. Diffusion bonding isa solid phase process achieved via atomic migration with nomacrodeformation of the components. Initial surface flatness andcleanliness are essential. Surface roughness values of less than 0.4microns are required and the samples must be cleaned prior to bonding.Typically the process variables range from several hours at moderatetemperatures (0.6 T_(m)) to minutes at higher temperatures (0.8 T_(m)),with applied pressure.

Metallic Brazing and Glass Intermediate Layer Bonding

Metallic brazing and glass intermediate layer bonding were developed toachieve lower temperature bonding, i.e. from about 400 to 700° C. Inthese two respective methods, the brazing element and the glassintermediate layer need to be melted during the bonding process. Thus,the applicable operating temperature of the integrated ceramic systemswill be limited by the melting point of the intermediate layers.

Problems Known to the Inventors—Not to be Considered Prior Art

The following are problems known to the inventors and are not to beconsidered as prior art for the purposes of the present invention.

In state-of-the-art ceramic bonding techniques, the components arebonded at high temperatures, i.e from about 0.6 to 0.8 Tm or from about400 to 700° C. At these high bonding temperatures, there are someinherent problems such as: residual stresses after bonding due to thedifference of thermal expansion coefficient between components; and thecomponents are susceptible to damage during the high temperature bondingprocess and this limits the range of materials to be bonded.

Present Invention

The present invention provides a method of anodically bonding ceramiccomponents at low temperatures, i.e. preferably from about 100 to 400°C. and more preferably from about 300 to 200° C. or lower.

For the purposes of this invention, ceramic components are preferablycomprised of, but are not limited to: alumina, titanium carbide, silica(SiO₂), silicon nitride (Si₃N₄). glass (including quartz, soda lime orborosilicate), silicates, oxides, carbides, nitrides and borides of thetransition elements, or partially or totally ceramic multiphasecomposites.

The present invention may also be used to fabricate and packagemicrosystems and nanosystems.

Conditioning of the First Ceramic Component 10—FIG. 1

As shown in FIG. 1, a first ceramic component 10 is conditioned by firstpolishing its upper and/or lower surfaces 11, 13 to achieve a mirrorfinish.

The mirrored surfaces 11, 13 are then cleaned in an organic or inorganiccleansing solvent. The cleansing solvent is preferably nitric acid,piranha (solution), ammonium hydrogen peroxide, RCA cleansing oracetone.

Deposition of First Transition Layer 12, First Conductive Layer 14 andIntermediate Film 16—FIG. 2

The first ceramic component 10 is then placed within a depositionchamber and a first transition layer 12 is deposited upon upper surface11 to a thickness of preferably from about 10 nm to 5 μm. Single ormultiple transition layers 12 for the promotion of adhesion, are appliedon the to-be bonded surface 11.

Typically, the transition layer 12 is deposited by physical vapordeposition methods or chemical vapor deposition methods. The gradienttransition layer 12 will be arranged as follows: the structure andcomposition of the first layer deposited on the ceramic component are assimilar as those of the ceramic components, then gradually changed to beas similar as those of the final conductive layer composed ofsemiconductive or conductive material. The thickness of the totaltransition layer ranges from nanometers to micrometers.

EXAMPLE 1

If the ceramic component is alumina (Al₂O₃), the composition and thestructure of the gradient transition layer will be Al_(x)O_(y). Theelement ratio y:x should be as close as 3:2 for the first layerdeposited on the alumina ceramic component, followed by layers with y:xratio less than 3:2, and gradually y:x ratio is reduced to 0.

EXAMPLE 2

If the ceramic component is titanium carbide (TiC), the composition andthe structure of the gradient transition layer will be Ti_(x)C_(y). Theelement ratio y:x should be as close as 1:1 for the first layerdeposited on the titanium carbide ceramic component, followed by layerswith y:x ratio less than 1:1, and gradually y:x ratio is reduced to 0.

EXAMPLE 3

If the ceramic component is silica (SiO₂) or silicon nitride (Si₃N₄),the transition layer can be Ti, TiW, or other materials which have lesslattice mismatch with the silica or silicon nitride component than thefinal conductive or semiconductive layer.

If the adhesion is not so critical, such multiple transition layers areneglected. The conductive layers can be directly deposited on the to-bebonded surfaces. Alternatively, just one single transition layer isused.

It is noted that the transition layer composition and type will changewith the to-be-bonded ceramics. There are several thousands of ceramics,therefore it's impossible to give out all the ceramics and neededtransition layer compositions and types. We can only provide theguideline how to select transition layer compositions and types.

A first conductive layer 14 is then deposited upon first transitionlayer 12 to a thickness of preferably from about 20 nm to 5 μm. Firstconductive layer 14 may be metallic or semiconductive and is preferablycomprised of Al, Cr, W, Ni, Ti, or alloys thereof, or silicon (Si) andis preferably deposited by (1) physical vapor deposition (PVD) whichincludes ablation, evaporation, ion beam deposition or sputtering; or(2) chemical vapor deposition (CVD).

Then, intermediate film 16 is deposited upon first conductive layer 14to a thickness of preferably from about 10 nm to 5 μm and morepreferably from about 10 nm to 2 μm.

Intermediate film 16, with or without alkaline ions, is preferablydeposited by dry or wet approaches, such as evaporation, sputtering or asol gel technique.

If intermediate film 16 is sol gel, the sol gel coating methods mayinclude spin-on, immersion or spraying and further, at least the uppersurface 11 is pretreated in organic or inorganic solutions such aspreferably nitric acid, piranha (solution), ammonium hydrogen peroxide,RCA cleansing or acetone to render at least the upper surface 11hydrophilic prior to deposition.

The first ceramic component 10 is then dried or tempered at atemperature ranging from room temperature, i.e., e.g. about 25° C., upto the anodic bonding temperature of the first and second ceramiccomponents 10, 18, for example from about 25 to 400° C.

Conditioning of the Second Ceramic Component 18—FIG. 3

As shown in FIG. 3, a second ceramic component 18 is conditioned bypreferably first polishing its lower and/or upper surfaces 21, 19 toachieve a mirror finish.

The mirrored surfaces 19, 21 are then cleaned in an organic or inorganiccleansing solvent. The cleansing solvent is preferably nitric acid,piranha (solution), ammonium hydrogen peroxide, RCA cleansing oracetone.

Deposition of Second Transition Film 20 and Second Conductive Layer22—FIG. 4

The second ceramic component 18 is then placed within a depositionchamber and a second transition layer 20 is deposited upon lower surface21 to a thickness of preferably from about 10 nm to 5 μm. Single ormultiple transition layers 22 for the promotion of adhesion, are appliedon the to-be bonded surface of both components. Typically, thetransition layer 20 is deposited by physical vapor deposition methods orchemical vapor deposition methods. The gradient transition layer 20 willbe arranged as follows: the structure and composition of the first layerdeposited on the ceramic component are as similar as those of theceramic components, then gradually change to be as similar as those ofthe final conductive layer composed of semiconductive or conductivematerial. The thickness of the total transition layer ranges fromnanometers to micrometers.

If the adhesion is not so critical, such multiple transition layers areneglected. The conductive layers can be directly deposited on the to-bebonded surfaces. Alternatively, just one single transition layer may beused.

A second conductive layer 22 is then deposited upon second transitionlayer 20 to a thickness of preferably from about 20 nm to 5 μm. Secondconductive layer 22 may be metallic or semiconductive and is preferablycomprised of Al, Cr, W, Ni, Ti, or alloys thereof, or silicon (Si) andis preferably deposited by (1) physical vapor deposition (PVD) whichincludes ablation, evaporation, ion beam deposition or sputtering; or(2) chemical vapor deposition (CVD).

Cleansing of One or Both of the First and Second Ceramic Components 10,18

Before bonding of the first and second ceramic components 10, 18 havingtheir respective layers/films 12, 14, 16; 20, 22 formed thereover, oneor both of them 10, 18 are cleansed:

in a cleansing solution preferably comprised of organic, sulfuric- orhydrogen-peroxide-based RCA solutions; at a temperature of preferablyfrom about 50 to 90° C.;

for preferably from about 5 to 10 minutes; to render the cleansedceramic component(s) 10, 18 hydrophilic.

Alignment of First and Second Ceramic Components 10, 18—FIG. 5

As shown in FIG. 5 and at room temperature, i.e. at about 25° C., thesecond ceramic component 18 is then aligned with and placed on top of,and spaced apart from using spacers 24, the first ceramic component 10so that the second conductive layer 22 on the second ceramic component18 opposes the intermediate film 16 on the first ceramic component 10.

Spacers 24 have a thickness of preferably from about 20 to 50 μm and areplaced at the edges of the first and second ceramic components 10, 18.

The stacked, spaced and aligned first and second ceramic components 10,18 are placed into a vacuum chamber.

Bringing The First and Second Ceramic Components 10, 18 into PointContact—FIG. 6

During vacuuming, the first and second ceramic components 10, 18 areheated to, and maintained at, a temperature of preferably from about 100and 400° C. and more preferably from about 300 to 200° C. or less.

As shown in FIG. 6, with spacers 24 still in place, the center portionsof the first and second ceramic components 10, 18 are brought intocontact under pressure 26 of preferably from about 0.001 to 100 N/m².

Removal of Spacers 24 and Anodic Bonding of the First and Second CeramicComponents 10, 18—FIG. 7

As shown in FIG. 7, spacers 24 are removed and the first and secondceramic components 10, 18 are anodically bonded at voltages ofpreferably from about 0 to 100 volts. The anodic bonding process isaccomplished by pressing the first and second ceramic components 10, 18together at one point from which the component 10, 18 contact waveproceeds to completion to form the bonded components 30. Initially, twocomponents contact at one point, and when the spacers are pulled out,the contact area will extend from point contact to full wafer (in orderto achieve hermetic or vacuum sealing).

The bonded components 30 have an excellent bond strength and can undergofurther harsh processes or be employed in adverse operatingenvironments.

As one skilled in the art would understand, three or more ceramiccomponents may be bonded employing the method and teachings of thepresent invention either simultaneously or sequentially.

It is noted that if adhesion is not critical, multiple transition layers12, 20 are not essential and only one transition layer 12, 20 need beused, or no transition layers 12, 20 need be used, with the conductivelayer(s) 14, 22 being directly deposited upon the first and/or secondceramic component 10, 18 not having the transition layer 12, 20.

It is noted that silicon layers and/or semiconductors may be used as thesecond (ceramic) component 18. In this case, the conductive film on thesecond component is not necessary. The inventors have achieved thefollowing successful specific cases of bonding in accordance with theteachings of the present invention, for example:

glass/silicon (Si) low temperature bonding (less than about 300° C.);

glass/glass low temperature bonding (less than about 300° C.);

Si/Si low temperature bonding (less than about 300° C.);

ceramic/ceramic low temperature bonding (less than about 300° C.); and

combinations of the above materials with low temperature bonding (lessthan about 300° C.).

The semiconductors may be Si (as noted above), GaAs, InP or SiGe. Glassmay be quartz, soda lime or borosilicate.

Further, as noted above, microsystems and nanosystems may be fabricatedand packaged in accordance with the teachings of the present invention.

The applications for the present invention may include:

micro electromechanical systems (MEMS);

bio-MEMS and microfluidic devices;

micro-opto-electro-mechanical system (MOEMS);

substrate fabrication;

semiconductors;

microelectronics;

optoelectronics; and

hermetic and vacuum sealing.

The commercialization potentials of the present invention may include:

wafer level MEMS packaging (RF, sensors, actuators et al.);

bio-MEMS (Si and glass systems) and microfluidic devices;

wafer level MOEMS packaging;

multilayer inorganic substrates;

semiconductor-on-insulator, CMOS;

3D integrated circuits (ID); and

optoelectronics: OEIC.

Advantages of the Present Invention

The advantages of one or more embodiments of the present inventioninclude:

1. a significantly reduced bonding temperature (preferably from about100 to 400° C. and more preferably from about 300 to 200° C. or lower);

2. the ability to bond similar or different ceramic materials;

3. degradation and damage of pre-fabricated devices and integratedcircuitry is avoided;

4. bonding-induced stress problems are reduced;

5. the bonding method is suitable for high-temperature applications;

6. reduced process cost;

7. high bonding quality;

8. the ability to bond semiconductors, glasses and ceramics; and

9. low residual stress and warpage.

While particular embodiments of the present invention have beenillustrated and described, it is not intended to limit the invention,except as defined by the following claims.

1. A method of bonding components, comprising the steps of: providing atleast a first ceramic component and a second ceramic component, each ofthe at least first and second ceramic components having an upper andlower surface; forming a first conductive layer over the upper surfaceof the first component; forming an intermediate film over the firstconductive layer; forming a second conductive layer over the lowersurface of the second ceramic component; then stacking the secondceramic component over the first ceramic component wherein the secondconductive layer on the second ceramic component opposes theintermediate film on the first ceramic component; and anodically bondingtogether the first and second ceramic components wherein at least onetransition layer is formed upon at least one of the first and secondceramic components.
 2. The method of claim 1, including the step of:polishing the upper and lower surfaces of the at least the first andsecond components, before formation of the at least one transitionlayer.
 3. The method of claim 1, including the step of: cleansing theupper and lower surfaces of the at least first and second components,before formation of the at least one transition layer.
 4. The method ofclaim 1, including the steps of: polishing the upper and lower surfacesof the at least the first and second components; and cleansing thepolished upper and lower surfaces of the at least first and secondcomponents, before formation of the at least one transition layer. 5.The method of claim 1, including the step of: drying the first ceramiccomponent, after formation of the second conductive layer and before thestacking of the first ceramic component and the second ceramiccomponent.
 6. The method of claim 1, including the step of: cleansing atleast one of the first and second ceramic components, after formation ofthe second conductive layer and before the stacking of the first ceramiccomponent and the second ceramic component.
 7. The method of claim 1,including the steps of: drying the first ceramic component; and thencleansing at least one of the first and second ceramic components, afterformation of the second conductive layer and before the stacking of thefirst ceramic component and the second ceramic component.
 8. The methodof claim 1, wherein the first and second ceramic components areanodically bonded together at a temperature of from about 100 to 400° C.9. A method of bonding components, comprising the steps of: providing atleast a first ceramic component and a second component; the at leastfirst ceramic component and the second component each having an upperand lower surface, the second component being comprised of a siliconlayer or a semiconductor layer; forming a conductive layer over theupper surface of the first ceramic component; forming an intermediatefilm over the conductive layer; then stacking the second component overthe first ceramic component wherein the upper or lower surface of thesecond component opposes the intermediate film on the first ceramiccomponent; and anodically bonding together the at least a first ceramiccomponent and the second component; wherein at least one transitionlayer is formed upon at least one of the at least a first ceramiccomponent and the second component, the at least one transition layer iscomprised of Al_(x)O_(y), Ti_(x)C_(y), Ti or TiW.
 10. The method ofclaim 1, wherein at least one transition layer is formed upon at leastone of the first and second ceramic components; the at least onetransition layer is comprised of Al_(x)O_(y), Ti_(x)C_(y), Ti or TiW.11. The method of claim 1, wherein at least one respective transitionlayer is formed upon both the first and second ceramic components. 12.The method of claim 1, wherein at least one respective transition layeris formed upon both the first and second ceramic components; the atleast one transition layer is comprised of Al_(x)O_(y), Ti_(x)C_(y), Tior TiW.
 13. The method of claim 1, wherein the first and second stackedceramic components are spaced apart using spacers before bonding. 14.The method of claim 1, wherein the first and second ceramic componentsare comprised of: glass; silicates; oxides; carbides, nitrides andborides of the transition elements; or multiphase composites which maybe totally or partially ceramic.
 15. The method of claim 1, wherein thefirst and second ceramic components are comprised of: quartz; silicates;oxides; carbides, nitrides and borides of the transition elements; ormultiphase composites which may be totally or partially ceramic.
 16. Themethod of claim 1, wherein the first and second ceramic components arecomprised of: alumina; titanium carbide; silica (SiO₂); silicon nitride(Si₃N₄); soda lime; or borosilicate.
 17. The method of claim 1, whereinthe first and second ceramic components are each comprised of the samematerial.
 18. The method of claim 1, wherein the first and secondceramic components are comprised of a different material.
 19. The methodof claim 1, wherein the first and second conductive layers are metallicor semiconductive.
 20. The method of claim 1, wherein the first andsecond conductive layers are comprised of Al, Cr, W, Ni, Ti, or alloysthereof, or silicon.
 21. The method of claim 1, wherein the firstconductive layer has a thickness of from about 20 nm to 5 μm; and thesecond conductive layer has a thickness of from about 20 nm to 5 μm. 22.The method of claim 1, wherein the intermediate film has a thickness offrom about 10 nm to 5 μm.
 23. The method of claim 1, including the stepof: drying the first ceramic component, after formation of the secondconductive layer and before the stacking of the first ceramic componentand the second ceramic component; wherein the first ceramic component isdried at from about 25 to 400° C.
 24. The method of claim 1, includingthe step of: cleansing at least one of the first and second ceramiccomponents, after formation of the second conductive layer and beforethe stacking of the first ceramic component and the second ceramiccomponent; wherein the cleansing of the at least one of the first andsecond ceramic components renders the at least one of the first andsecond ceramic components hydrophilic.
 25. The method of claim 1,wherein the first and second ceramic components are anodically bondedtogether at a temperature of from about 300 to 200° C.
 26. The method ofclaim 1, wherein the first and second ceramic components are bondedtogether at a temperature of less than about 200° C.
 27. The method ofclaim 1, wherein the method is employed in: micro electromechanicalsystems (MEMS); bio-MEMS and microfluidic devices;micro-opto-electro-mechanical system (MOEMS); substrate fabrication;semiconductors; microelectronics; optoelectronics; or hermetic andvacuum sealing.
 28. The method of claim 1, wherein the method isemployed in: wafer level MEMS packaging (RF, sensors, actuators et al.);bio-MEMS (Si and glass systems) and microfluidic devices; wafer levelMOEMS packaging; multilayer inorganic substrates;semiconductor-on-insulator, CMOS; 3D integrated circuits (ID); oroptoelectronics: OEIC.
 29. The method of claim 1, wherein theintermediate film includes alkaline ions or does not include alkalineions.
 30. A method of bonding components, comprising the steps of:providing at least a first ceramic component and a second ceramiccomponent, each of the at least first and second ceramic componentshaving an upper and lower surface; polishing the upper and lowersurfaces of the at least the first and second ceramic components;cleansing the polished upper and lower surfaces of the at least firstand second ceramic components; forming a first conductive layer over thecleansed upper surface of the first ceramic component; forming anintermediate film over the first conductive layer; forming a secondconductive layer over the cleansed lower surface of the second ceramiccomponent; then drying the first ceramic component; then cleansing atleast one of the first and second ceramic components; then stacking thesecond ceramic component over the first ceramic component wherein thesecond conductive layer on the second ceramic component opposes theintermediate film on the first ceramic component; and anodically bondingtogether the first and second ceramic components at a temperature offrom about 100 to 400° C.; wherein at least one transition layer isformed upon at least one of the first and second ceramic components. 31.The method of claim 30, wherein the at least one transition layer iscomprised of Al_(x)O_(y), Ti_(x)C_(y), Ti or TiW.
 32. The method ofclaim 30, wherein at least one respective transition layer is formedupon both the first and second ceramic components.
 33. The method ofclaim 30, wherein the first and second stacked ceramic components arespaced apart using spacers before bonding.
 34. The method of claim 30,wherein the first and second ceramic components are comprised of: glass;silicates; oxides; carbides, nitrides and borides of the transitionelements; or multiphase composites which may be totally or partiallyceramic.
 35. The method of claim 30, wherein the first and secondceramic components are comprised of: quartz; silicates; oxides of;carbides, nitrides and borides of the transition elements; or multiphasecomposites which may be totally or partially ceramic.
 36. The method ofclaim 30, wherein the first and second ceramic components are comprisedof: alumina; titanium carbide; silica (SiO₂); silicon nitride (Si₃N₄);soda lime; or borosilicate.
 37. The method of claim 30, wherein thefirst and second ceramic components are each comprised of the samematerial.
 38. The method of claim 30, wherein the first and secondceramic components are comprised of a different material.
 39. The methodof claim 30, wherein the first and second conductive layers are metallicor semiconductive.
 40. The method of claim 30, wherein the first andsecond conductive layers are comprised of Al, Cr, W, Ni, Ti, or alloysthereof, or silicon.
 41. The method of claim 30, wherein the firstconductive layer has a thickness of from about 20 nm to 5 μm; and thesecond conductive layer has a thickness of from about 20 nm to 5 μm. 42.The method of claim 30, wherein the intermediate film has a thickness offrom about 10 nm to 5 μm.
 43. The method of claim 30, wherein the firstceramic component is dried at from about 25 to 400° C.
 44. The method ofclaim 30, wherein the cleansing of the at least one of the first andsecond ceramic components renders the at least one of the first andsecond ceramic components hydrophilic.
 45. The method of claim 30,wherein the first and second ceramic components are bonded together at atemperature of from about 300 to 200° C.
 46. The method of claim 30,wherein the first and second ceramic components are bonded together at atemperature of less than about 200° C.
 47. The method of claim 30,wherein the method is employed in: micro electromechanical systems(MEMS); bio-MEMS and microfluidic devices; micro-opto-electro-mechanicalsystem (MOEMS); substrate fabrication; semiconductors; microelectronics;optoelectronics; or hermetic and vacuum sealing.
 48. The method of claim30, wherein the method is employed in: wafer level MEMS packaging (RF,sensors, actuators et al.); bio-MEMS (Si and glass systems) andmicrofluidic devices; wafer level MOEMS packaging; multilayer inorganicsubstrates; semiconductor-on-insulator, CMOS; 3D integrated circuits(ID); or optoelectronics: OEIC.
 49. The method of claim 30, wherein theintermediate film includes alkaline ions or does not include alkalineions.
 50. A method of bonding ceramic components, comprising the stepsof: providing at least a first ceramic component and a second ceramiccomponent, each of the at least first and second ceramic componentshaving an upper and lower surface; polishing the upper and lowersurfaces of the at least the first and second ceramic components;cleansing the polished upper and lower surfaces of the at least firstand second ceramic components; forming a first transition layer over thecleansed upper surface of the first ceramic component; forming a firstconductive layer over the first transition layer; forming anintermediate film over the first conductive layer; the intermediate filmincluding alkaline ions or not including alkaline ions; forming a secondtransition layer over the cleansed lower surface of the second ceramiccomponent; forming a second conductive layer over the second transitionlayer; then drying the first ceramic component; then cleansing at leastone of the first and second ceramic components; then stacking the secondceramic component over the first ceramic component wherein the secondconductive layer on the second ceramic component opposes theintermediate film on the first ceramic component; and anodically bondingtogether the first and second ceramic components at a temperature offrom about 100 to 400° C.
 51. The method of claim 50, wherein the firstand second transition layers are comprised of Al_(x)O_(y), Ti_(x)C_(y),Ti or TiW.
 52. The method of claim 50, wherein the first and secondstacked ceramic components are spaced apart using spacers beforebonding.
 53. The method of claim 50, wherein the first and secondceramic components are comprised of: glass; silicates; oxides; carbides,nitrides and borides of the transition elements; or multiphasecomposites which may be totally or partially ceramic.
 54. The method ofclaim 50, wherein the first and second ceramic components are comprisedof: quartz; silicates; oxides; carbides, nitrides and borides of thetransition elements; or multiphase composites which may be totally orpartially ceramic.
 55. The method of claim 50, wherein the first andsecond ceramic components are comprised of: alumina; titanium carbide;silica (SiO₂); silicon nitride (Si₃N₄); soda lime; or borosilicate. 56.The method of claim 50, wherein the first and second ceramic componentsare each comprised of the same material.
 57. The method of claim 50,wherein the first and second ceramic components are comprised of adifferent material.
 58. The method of claim 50, wherein the first andsecond conductive layers are metallic or semiconductive.
 59. The methodof claim 50, wherein the first and second conductive layers arecomprised of Al, Cr, W, Ni, Ti, or alloys thereof, or silicon.
 60. Themethod of claim 50, wherein the first conductive layer has a thicknessof from about 20 nm to 5 μm; and the second conductive layer has athickness of from about 20 nm to 5 μm.
 61. The method of claim 50,wherein the intermediate film has a thickness of from about 10 nm to 5μm.
 62. The method of claim 50, wherein the first ceramic component isdried at from about 25 to 400° C.
 63. The method of claim 50, whereinthe cleansing of the at least one of the first and second ceramiccomponents renders the at least one of the first and second ceramiccomponents hydrophilic.
 64. The method of claim 50, wherein the firstand second ceramic components are bonded together at a temperature offrom about 300 to 200° C.
 65. The method of claim 50, wherein the firstand second ceramic components are bonded together at a temperature ofless than about 200° C.
 66. The method of claim 50, wherein the methodis employed in: micro electromechanical systems (MEMS); bio-MEMS andmicrofluidic devices; micro-opto-electro-mechanical system (MOEMS);substrate fabrication; semiconductors; microelectronics;optoelectronics; or hermetic and vacuum sealing.
 67. The method of claim50, wherein the method is employed in: wafer level MEMS packaging (RF,sensors, actuators et al.); bio-MEMS (Si and glass systems) andmicrofluidic devices; wafer level MOEMS packaging; multilayer inorganicsubstrates; semiconductor-on-insulator, CMOS; 3D integrated circuits(ID); or optoelectronics: OEIC.
 68. The method of claim 9, wherein theintermediate film includes alkaline ions or does not include alkalineions.
 69. The method of claim 9, including the step of: polishing theupper and lower surfaces of the at least a first ceramic component andthe second component, before formation of the at least one transitionlayer.
 70. The method of claim 9, including the step of: cleansing theupper and lower surfaces of the at least a first ceramic component andthe second component, before formation of the at least one transitionlayer.
 71. The method of claim 9, including the steps of: polishing theupper and lower surfaces of the at least a first ceramic component andthe second component; and cleansing the polished upper and lowersurfaces of the at least a first ceramic component and the secondcomponent, before formation of the at least one transition layer. 72.The method of claim 9, including the step of: drying the first ceramiccomponent, after formation of the intermediate film and before thestacking of the at least a first ceramic component and the secondcomponent.
 73. The method of claim 9, including the step of: cleansingat least one of the at least a first ceramic component and the secondcomponent, after formation of the intermediate film and before thestacking of the at least a first ceramic component and the secondcomponent.
 74. The method of claim 9, including the steps of: drying thefirst ceramic component; and then cleansing at least one of the at leasta first ceramic component and the second component, after formation ofthe intermediate film and before the stacking of the at least a firstceramic component and the second component.
 75. The method of claim 9,wherein the at least a first ceramic component and the second componentare anodically bonded together at a temperature of from about 100 to400° C.
 76. The method of claim 9, wherein at least one respectivetransition layer is formed upon both the at least a first ceramiccomponent and the second component.
 77. The method of claim 9, whereinat least one respective transition layer is formed upon both of the atleast a first ceramic component and the second component.
 78. The methodof claim 9, wherein the at least a first ceramic component and thesecond component are spaced apart using spacers before bonding.
 79. Themethod of claim 9, wherein the first ceramic component is comprised of:glass; silicates; oxides; carbides, nitrides and borides of thetransition elements; or 0multiphase composites which may be totally orpartially ceramic.
 80. The method of claim 9, wherein the first ceramiccomponent is comprised of: quartz; silicates; oxides; carbides, nitridesand borides of the transition elements; or multiphase composites whichmay be totally or partially ceramic.
 81. The method of claim 9, whereinthe first ceramic component is comprised of: alumina; titanium carbide;silica (SiO₂); silicon nitride (Si₃N₄); soda lime; or borosilicate. 82.The method of claim 9 wherein the first ceramic component is glass. 83.The method of claim 9, wherein the conductive layer is metallic orsemiconductive.
 84. The method of claim 9, wherein the conductive layeris comprised of Al, Cr, W, Ni, Ti, or alloys thereof, or silicon. 85.The method of claim 9, wherein the conductive layer has a thickness offrom about 20 nm to 5 μm.
 86. The method of claim 9, wherein theintermediate film has a thickness of from about 10 nm to 5 μm.
 87. Themethod of claim 9, including the step of: drying the first ceramiccomponent, after formation of the intermediate film and before thestacking of the at least a first ceramic component and a secondcomponent; wherein the first ceramic component is dried at from about 25to 400° C.
 88. The method of claim 9, including the step of: cleansingat least one of the at least a first ceramic component and a secondcomponent, after formation of the intermediate film and before thestacking of the at least a first ceramic component and a secondcomponent; wherein the cleansing of the at least one of the at least afirst ceramic component and a second component renders the at least oneof the at least a first ceramic component and a second componenthydrophilic.
 89. The method of claim 9, wherein the at least a firstceramic component and a second component are anodically bonded togetherat a temperature of from about 300 to 200° C.
 90. The method of claim 9,wherein the at least a first ceramic component and a second componentare bonded together at a temperature of less than about 200° C.